Development of optical monitor for control of thin-film deposition

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TypeArticle
Journal titleApplied optics
ISSN0003-6935
Volume25
IssueOctober 20
Pages36453652; # of pages: 8
Publication date
Linkhttp://ao.osa.org/abstract.cfm?id=29742
LanguageEnglish
AffiliationNRC Institute for National Measurement Standards; National Research Council Canada
Peer reviewedNo
Identifier10010245
NRC number1018
NPARC number8896731
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Record identifier979811d5-e148-41a6-adae-39e869d681fa
Record created2009-04-22
Record modified2016-05-09
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