Research on thin film coatings at the National Research Council

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TypeArticle
Proceedings titleCanadian Journal of Physics
ConferenceSeventh Canadian Semiconductor Technology Conference, Auguest 14-18, 1995, Ottawa Ontario Canada
ISSN00084204
Volume74 suppl.
PagesS43S46; # of pages: 4
Publication date
PublisherNational Research Council of Canada
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12328667
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Record identifier987c1b9d-0eb7-4d4b-b7bd-35e733dc874b
Record created2009-09-10
Record modified2016-05-09
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