Stiction-free fabrication of lithographic nanostructures on resist-supported nanomechanical resonators

Download
  1. Get@NRC: Stiction-free fabrication of lithographic nanostructures on resist-supported nanomechanical resonators (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1116/1.4821194
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ISSN1071-1023
Volume31
Issue5
Article number51805
SubjectElectron beam patterning; Fabrication process; Hydrofluoric acid etching; Nanomechanical device; Nanomechanical resonators; Silicon-on-insulator substrates; Surface micromachined structure; Wide temperature ranges; Hydrofluoric acid; Magnetic moments; Magnetostatics; Nanostructures; Resonators; Thermomechanical treatment; Fabrication
AbstractThe authors report a highly flexible process for nanostructure lithography to incorporate specific functions in micro- and nanomechanical devices. The unique step involves electron beam patterning on top of released, resist-supported, surface micromachined structures, hence avoiding hydrofluoric acid etching of sensitive materials during the device release. The authors demonstrate the process by creating large arrays of nanomechanical torque magnetometers on silicon-on-insulator substrates. The fabricated devices show a thermomechanical noise-limited magnetic moment sensitivity in the range of 5 × 106 μB at room temperature and can be utilized to study both magnetostatics and dynamics in nanomagnets across a wide temperature range. The fabrication process can be generalized for the deposition and patterning of a wide range of materials on micro-/nanomechanical resonators. © 2013 Crown.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); National Institute for Nanotechnology (NINT-INNT)
Peer reviewedYes
NPARC number21269841
Export citationExport as RIS
Report a correctionReport a correction
Record identifier98c5f1ee-742d-4bdc-9274-bb6dbc13c901
Record created2013-12-13
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)