Recommended practices for measuring and reporting outgassing data

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DOIResolve DOI: http://doi.org/10.1116/1.1496783
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TypeArticle
Journal titleJournal of Vacuum Science and Technology A
Volume20
Issue5
Pages16671675; # of pages: 9
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744397
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Record identifier9989dcab-688b-453d-8ffa-df55f207ad84
Record created2009-10-27
Record modified2016-05-09
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