Ultra-precision laser micromachining system integrated with piezoelectric motion stage

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TypeArticle
Proceedings titleProceedings of 2004 International Workshop on Advanced Manufacturing Technologies and Integrated Systems
Conference2004 International Workshop on Advanced Manufacturing Technologies and Integrated Systems, June 2-3, 2004, London ON, Canada
ISBN0-662-37151-8
Publication date
LanguageEnglish
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
IdentifierAMT2004-33
NPARC number21274400
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Record identifier9cc36130-07fc-4c7d-ab6b-dad5a500ed1d
Record created2015-03-11
Record modified2016-05-09
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