Synthesis of amorphous silicon carbonitride films by pulsed laser deposition

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DOIResolve DOI: http://doi.org/10.1016/S0040-6090(01)01673-X
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TypeArticle
Journal titleThin Solid Films
Volume402
Issue1-2
Pages99110; # of pages: 12
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Institute for National Measurement Standards
Peer reviewedNo
NPARC number12743923
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Record identifier9d2e3fd0-565f-4390-9d85-36162be86bfd
Record created2009-10-27
Record modified2016-05-09
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