Nanostructured metal oxide thin films for humidity sensors

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DOIResolve DOI: http://doi.org/10.1109/JSEN.2008.920715
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TypeArticle
Journal titleIEEE Sensors Journal
ISSN1530-437X
Volume8
Issue7-8
Pages14221429; # of pages: 8
AbstractCapacitive humidity sensors were fabricated using countersunk interdigitated electrodes coated with amorphous nanostructured TiO2, SiO2, and Al2O3 thin films grown by glancing angle deposition. The capacitive response and response times for each sensor were measured. The sensor utilizing TiO2 exhibited the largest change in capacitance, increasing exponentially from ~ 1 nF to ~ 1muF for an increase in relative humidity from 2% to 92%. Adsorption and desorption response times were measured using flow rates of 2.5 l/min and were between 90 ms and 300 ms for the sensors studied here. A simple model of the capacitive response of the devices has been developed and used to calculate the dielectric constant of the combined system of our films and adsorbed water. The obtained dielectric constants are found to be much higher than bulk or literature values for similar systems.
Publication date
LanguageEnglish
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number629
414
NPARC number8926533
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Record identifier9d6971b6-0c7a-4a9b-9ad2-2d54952724e1
Record created2009-04-23
Record modified2016-05-09
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