Metallic NEMS components fabricated from nanocomposite Al-Mo films

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TypeArticle
Journal titleNanotechnology
Volume17
Issue12
Pages306370; # of pages: 2994
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number166
NPARC number8926110
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Record identifier9f0ec49f-6e0d-49c3-84e9-5707c9efca5d
Record created2009-04-23
Record modified2016-05-09
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