Magnetic field-assisted electroless anodization : TiO2 nanotube growth on discontinuous, patterned Ti films

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DOIResolve DOI: http://doi.org/10.1039/c4ta02448f
AuthorSearch for: ; Search for:
TypeArticle
Journal titleJournal of Materials Chemistry A
ISSN2050-7488
Volume2
Issue34
Pages1381013816; # of pages: 7
SubjectAnodic oxidation; Aspect ratio; Electrodes; Magnetic fields; Nanotubes; Oxide films; Titanium; Anodization process; Anodization techniques; Anodization voltages; Floating potentials; High-aspect ratio; Microscale patterns; Nanostructured semiconductor; Substrate conductivity; Substrates
AbstractWe present a magnetic field-assisted oxidation and etching process that transforms Ti thin films on arbitrary substrates into self-organized TiO 2 nanotube arrays without the direct application of an anodization voltage between the cathode and the Ti film/substrate. In effect, the Ti film/substrate electrode is at a floating potential determined by the ionic Hall voltage. The development of such a magnetic field-assisted electroless anodization process, frees the anodization technique of forming nanostructured semiconductors and metal oxides from the constraints of substrate conductivity and film continuity imposed by the traditional anodization process, and allows the creation of uniform anodic nanostructures on pre-existing high-aspect ratio patterns as well as on substrates containing both conductive and non-conductive areas. Using magnetic field assisted electroless anodization, we demonstrate the formation of microscale patterns of high quality TiO2 nanotubes from discontinuous Ti films deposited on thermal oxide-coated Si substrates and patterned by a lift-off process.
Publication date
LanguageEnglish
AffiliationSecurity and Disruptive Technologies; National Research Council Canada
Peer reviewedYes
NPARC number21272901
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Record identifier9f118d0f-7567-4c58-8bae-9e92b2cddc65
Record created2014-12-03
Record modified2016-05-09
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