Physics and Technology of High-k Gate Dielectrics 5

EditorSearch for: Iwai, H.; Search for: Kar, S.; Search for: De Gendt, S.; Search for: Houssa, M.; Search for: Landheer, Dolf; Search for: Misra, D.
TypeBook Chapter
Book titleECS Transactions
Volume11
Issue4
PublisherThe Electrochemical Society
PlacePennington NJ
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346786
Export citationExport as RIS
Report a correctionReport a correction
Record identifiera10c0451-ed7d-4b2d-953d-157d26c06c52
Record created2009-09-17
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)