Calculations of thermal and electrical distributions in silicon microstructures

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TypeArticle
Journal titlePHOENICS Journal : Computational Fluid Dynamics & its Applications
Volume14
IssueJune 1
Pages111; # of pages: 11
SubjectCFD modeling, gas sensor, heat transfer, microstructure, ohmic heating
AbstractThis paper describes a research programme directed towards modelling the thennomechanical behaviour of silicon microstructures. A three-dimensional numerical scheme was used to compute heat transfer and distribution of electric potential in the layers of two microhotplate designs. Detailed information was obtained on the local temperature distribution in the designs, and surrounding substrate. Variable properties of the different layers in the microstructures were accounted for. Calculations indicated that overall heat transfer coefficients obtained from these studies agreed with values derived from experimentally obtained emission data, to within 6%.
Publication date
LanguageEnglish
AffiliationNRC Institute for Research in Construction; National Research Council Canada
Peer reviewedYes
NRC number44766
10263
NPARC number20378965
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Record identifiera22e62a6-3afa-4f36-b650-2a0fa0ddad37
Record created2012-07-24
Record modified2016-05-09
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