Structure characterization of porous silicon layers based on a theoretical analysis

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DOIResolve DOI: http://doi.org/10.1021/la025508p
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TypeArticle
Journal titleLangmuir
ISSN0743-7463
Volume18
Issue10
Pages41654170; # of pages: 6
AbstractA theoretical framework is presented to allow for the determination of the basic structural parameters of a porous silicon thin layer using constructive-destructive positions of Fabry-Perot fringes in air. The structural parameters include film thickness, porosity, and refractive index between 350 and 2000 nm. The model is general and can be applied to determine the optical properties of any thin layer that exhibits a Fabry-Perot fringe pattern. Such information is of importance to fabricate practical sensing devices with low costs for various applications in biomedicine and analytical and environmental chemistry.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Biotechnology Research Institute; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
Identifier10367391
NPARC number12337879
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Record identifiera53cddbc-9f30-4e4d-8076-a3a35300c61b
Record created2009-09-10
Record modified2016-05-09
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