Block Copolymer Templated Etching on Silicon

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TypeArticle
Journal titleNano Letters
Volume7
Issue2
Pages4649; # of pages: 456
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number304
NPARC number8926467
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Record identifiera7f1d324-5adf-40ef-97a9-8a6827e165d3
Record created2009-04-23
Record modified2016-05-09
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