Increasing the range of unambiguity in step-height measurement using multiple-wavelength interferometry — application to absolute long gauge block measurement

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DOIResolve DOI: http://doi.org/10.1364/AO.42.005670
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TypeArticle
Journal titleApplied optics
ISSN0003-6935
Volume42
IssueOctober 28
Pages56705678; # of pages: 9
AbstractAn instrument for step-height measurement by multiple-wavelength interferometry is described. The addition of a 1152-nm wavelength to a multiple-wavelength scheme applying wavelengths of 633, 612, and 543 nm relaxes the tolerance range of the required preliminary measurement to ±140 μm, if the total uncertainty in the fringe fraction measurement can be kept below 2%. For larger fringe fraction measurement uncertainty, numerical simulations show that the integer number of interference orders can still be determined unambiguously if the range in the preliminary knowledge of the length has been correspondingly reduced. The interferometer instrument is described, and experimental data are presented in the context of long gauge block calibration at the National Research Council of Canada.
Publication date
LanguageEnglish
AffiliationNRC Institute for National Measurement Standards; National Research Council Canada
Peer reviewedNo
Identifier10010245
NRC number233
NPARC number8899861
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Record identifiera94a8255-b44b-4dce-810d-a9f6dde7b8fd
Record created2009-04-22
Record modified2016-05-09
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