Four-probe measurements with a three-probe scanning tunneling microscope

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DOIResolve DOI: http://doi.org/10.1063/1.4872383
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TypeArticle
Journal titleReview of Scientific Instruments
ISSN1089-7623
Volume85
Issue4
Article number45126
SubjectLoading; Microscopes; Scanning electron microscopy; Surfaces; Atomic resolution; Automated feedback; Contact formation; Electrical stability; Field ion microscope; Four-probe measurement; Material characterizations; Reproducibilities; Probes
AbstractWe present an ultrahigh vacuum (UHV) three-probe scanning tunneling microscope in which each probe is capable of atomic resolution. A UHV JEOL scanning electron microscope aids in the placement of the probes on the sample. The machine also has a field ion microscope to clean, atomically image, and shape the probe tips. The machine uses bare conductive samples and tips with a homebuilt set of pliers for heating and loading. Automated feedback controlled tip-surface contacts allow for electrical stability and reproducibility while also greatly reducing tip and surface damage due to contact formation. The ability to register inter-tip position by imaging of a single surface feature by multiple tips is demonstrated. Four-probe material characterization is achieved by deploying two tips as fixed current probes and the third tip as a movable voltage probe. © 2014 AIP Publishing LLC.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); National Institute for Nanotechnology (NINT-INNT)
Peer reviewedYes
NPARC number21272249
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Record identifieraa3f04a5-1cb4-4436-b6d5-72d065d3051b
Record created2014-07-23
Record modified2016-05-09
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