A measurement of young’s modulus and residual stress in MEMS bridges using a surface profiler

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DOIResolve DOI: http://doi.org/10.1088/0960-1317/13/5/321
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TypeArticle
Journal titleJournal of Micromechanics and Microengineering
Volume13
Issue5
Pages686692; # of pages: 7
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744629
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Record identifieracec03b3-c346-45c3-89cb-5f9d766244c8
Record created2009-10-27
Record modified2016-05-09
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