Equilibrium position of misfit dislocations in thin epitaxial films

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DOIResolve DOI: http://doi.org/10.1088/0268-1242/18/4/320
AuthorSearch for: ; Search for:
TypeArticle
Journal titleSemiconductor Science and Technology
Volume18
Issue4
Pages307311; # of pages: 5
AbstractThe role of the free surface in determining the equilibrium position of misfit dislocations in thin epitaxial films is considered. When the film is elastically stiffer than the substrate, the core of the dislocation is predicted to lie at some distance from the interface in the softer substrate. On the other hand, when the film is softer than the substrate, the core of the dislocation is always predicted to lie close to the interface.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12744594
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Record identifierad103f66-14d3-4497-9c57-8a104e0ce75d
Record created2009-10-27
Record modified2016-05-09
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