Post-Processing of CMOS Chips for BioFET DNA Sensor Arrays

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TypeArticle
ConferenceThirteenth Canadian Semiconductor Technology Conference, August 14-17, 2007, Montreal, Canada
Pages285286; # of pages: 2
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
NPARC number12346344
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Record identifierae26f162-f853-42df-8d32-7dbca7323287
Record created2009-09-17
Record modified2016-05-09
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