Characterization of Gd2O3 films deposited on Si100 by e-beam evaporation from pressed-powder targets

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TypeArticle
Conference15th Symposium on Low and High Dielctric Constant Mateirals: Materials Science, Processing, and Reliability Issues, May 2000, Toronto
Volume2005
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Institute for National Measurement Standards
Peer reviewedNo
NPARC number12346325
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Record identifieraec0d541-acbe-4bc9-aa15-bd06f6befc88
Record created2009-09-17
Record modified2016-05-09
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