Highly compliant static microcantilevers fabricated in gold nanocomposite materials

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DOIResolve DOI: http://doi.org/10.1088/0960-1317/21/11/115022
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Journal titleJournal of Micromechanics and Microengineering
Article number115022
SubjectAdverse effect; Alkanethiol molecules; Alkanethiols; Cosputtering; Dodecanethiols; Fcc structures; Metal nanocomposites; Micro-cantilevers; Nanocomposite alloys; Reactive ion etch; Spring constants; Static deflections; Stress sensitivity; Ta films; Vapor Phase; Angle measurement; Chemisorption; Composite micromechanics; Contact angle; Diffraction; Gold; Molecules; Nanocantilevers; Nanocomposites; Photoelectron spectroscopy; Photolithography; Self assembled monolayers; Semiconducting silicon compounds; Silicon wafers; Sulfur hexafluoride; Synthesis (chemical); Tantalum; X ray diffraction; X ray diffraction analysis; X ray photoelectron spectroscopy; Nanocomposite films
AbstractStatic microcantilevers with superior stress sensitivity were produced out of a novel Au-Ta metal nanocomposite, and successfully employed for the detection of chemisorbed dodecanethiol. Au-Ta nanocomposite films of various compositions were first synthesized by co-sputtering in order to assess the chemisorption of alkanethiol molecules on their surfaces. Previous x-ray diffraction analysis showed that from 0-50% at. Ta, the films retain gold's FCC structure and 〈1 1 1〉 texture necessary for the formation of an alkanethiol self-assembled monolayer. Attachment of dodecanethiol molecules from vapor phase onto the surface of our Au-Ta films was then quantified using contact angle measurements and x-ray photoelectron spectroscopy. As suggested by the x-ray diffraction results, the incorporation of small amounts of tantalum (5% and 10% at. Ta films) had little adverse effect on the attachment of dodecanethiol. However, this ceased to be the case at 20% at. Ta and above. Static microcantilevers were then fabricated directly out of a 5% Au-Ta nanocomposite alloy by patterning the sputtered Au-Ta layer onto a silicon wafer using contact photolithography and releasing the cantilever with an SF 6 reactive ion etch. Cantilevers 140 μm long, 20 μm wide, and 369 nm thick showed a spring constant of 10.5 mN m -1. The detection of chemisorbed dodecanethiol molecules was successfully demonstrated with these structures through the monitoring of static deflections. © 2011 IOP Publishing Ltd.
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AffiliationNational Research Council Canada (NRC-CNRC); National Institute for Nanotechnology
Peer reviewedYes
NPARC number21271964
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Record identifieraef59d5e-c9b6-4edd-b38e-66ff74c02e61
Record created2014-05-14
Record modified2016-05-09
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