Fabrication of NOx gas sensors using In2O3–ZnO composite films

Download
  1. (PDF, 795 KB)
  2. Get@NRC: Fabrication of NOx gas sensors using In2O3–ZnO composite films (Opens in a new window)
DOIResolve DOI: http://doi.org/10.1016/j.snb.2010.02.040
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Journal titleSensors and Actuators B
Volume146
Issue1
Pages2834; # of pages: 7
SubjectGas sensor; Indium oxide; In₂O₃–ZnO; Nitric oxide; Zinc oxide
AbstractIn₂O₃–ZnO composite films were fabricated and their NOx sensing characteristics were investigated in this study. The content of ZnO in In₂O₃–ZnO film was controlled by adjusting the Zn2+/In3+ molar ratio (r) during the film preparation. With suitable amount of ZnO incorporated into the In₂O₃ films, the responses of the composite films to NOx at operation temperatures below 200 °C were greatly improved. However, as the ZnO content was further increased, the grain of the composite film started to merge into big ones, thus decreasing the surface area and resulting in lower sensor responses. The detection limit (S/N=3) of In₂O₃–ZnO composite film (r = 0.67) reached 12 ppb at 150 °C. Both pure In2O3 (r = 0) and In₂O₃–ZnO composite films (r = 0.67) showed no response to CO gas.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Institute for Chemical Process and Environmental Technology
Peer reviewedYes
NRC number52023
NPARC number16054716
Export citationExport as RIS
Report a correctionReport a correction
Record identifierb1a2b33d-920a-4986-9432-723c251e2ef5
Record created2010-09-08
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)