Sub-wavelength cladding mid-infrared devices

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Proceedings titleIEEE International Conference on Group IV Photonics GFP
Conference12th IEEE International Conference on Group IV Photonics, GFP 2015, 26 August 2015 through 28 August 2015
Article number7305897
Pages183184; # of pages: 2
SubjectDiffraction gratings; Electric losses; Hydrofluoric acid; Photonics; Silicon on insulator technology; Waveguides; Buried oxide layers; Extinction ratios; Machzehnder interferometers (MZI); Mid-infrared devices; Mid-infrared wavelengths; Multimode interference couplers; Subwavelength grating; Suspended structure; Infrared devices
AbstractSuspended structures enable low loss propagation in silicon waveguides for mid-infrared wavelengths by removing the lossy buried oxide (BOX) layer. We previously demonstrated suspended waveguides with a silicon core and a sub-wavelength grating (SWG) lateral cladding, which allows access to the buried oxide layer for under-etching with hydrofluoric acid. Here we show that bends, multimode interference couplers (MMI) and Mach-Zehnder interferometers (MZI) can be successfully implemented in this platform. Specifically, we report waveguides with propagation losses of 1.2 dB/cm, 90° bends with 0.03 dB/bend loss, compact MMI couplers with imbalances of 0.5 dB, and MZI structures with extinction ratios in excess of 24 dB.
Publication date
AffiliationNational Research Council Canada; Information and Communication Technologies
Peer reviewedYes
NPARC number21277420
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Record identifierb1d5b348-e75a-4c51-8b83-1312dfc5e015
Record created2016-03-09
Record modified2016-05-09
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