Study of thin film inhomogeneity with a fast-scanning acousto-optic spectrophotometer

DOIResolve DOI: http://doi.org/10.1117/12.246817
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TypeArticle
AbstractA novel device, the fast-scanning acousto-optic spectrophotometer, was used to measure the in situ reflectance of a thin film during deposition. The reflectance data, which was measured at different film thicknesses and over a wavelength region from 400 to 1100 nm, was used to study the refractive index profile of inhomogeneous ZrO2 films. This data was subsequently analyzed using a homogeneous thin film model to derive an 'effective' refractive index profile.
PublisherSPIE
PlaceGlasgow, United Kingdom
AffiliationNational Research Council Canada
Peer reviewedNo
NPARC number12338957
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Record identifierb269c19d-02d2-4765-9ab3-5fe4d9c50b07
Record created2009-09-11
Record modified2016-05-09
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