High-rate automated deposition system for the manufacture of complex multilayer coatings

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DOIResolve DOI: http://doi.org/10.1364/AO.39.000157
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TypeArticle
Journal titleApplied Optics
Volume39
Issue1
Pages157
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Industrial Research Assistance Program
Peer reviewedNo
NPARC number12744256
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Record identifierb296218e-5759-4d76-9712-d737b6e6bda5
Record created2009-10-27
Record modified2016-05-09
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