Integrated antennas on SI with over 100 GHz performance, fabricated using an optimized proton implantation process

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DOIResolve DOI: http://doi.org/10.1109/LMWC.2003.817146
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TypeArticle
Journal titleIEEE Microwave and Wireless Components Letters
Volume13
Issue11
Pages487489; # of pages: 3
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744627
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Record identifierb2f0923f-f242-4d64-a719-7b17873e7dae
Record created2009-10-27
Record modified2016-05-09
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