Nanofabrication: techniques and principles

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EditorSearch for: Stepanova, Maria; Search for: Dew, Steven
AbstractIntended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Publication date
PublisherSpringer International Publishing
AffiliationNational Research Council Canada (NRC-CNRC); National Institute for Nanotechnology
Peer reviewedYes
NPARC number21275848
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Record identifierb56ffebd-ced7-45a4-8560-2af29eb8a7b3
Record created2015-07-14
Record modified2016-05-09
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