Deposition and Characterization of LaS Lanthanum Monosulfide Thin Films Grown by Pulsed Laser Ablation

DOIResolve DOI: http://doi.org/10.1109/IVNC.2005.1619571
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EditorSearch for: Wilshaw, P.; Search for: Hug, S.
TypeArticle
Proceedings titleTechnical Digest of the 18th International Vacuum Nanoelectronics Conference
Conference18th International Vacuum Nanoelectronics Conference, 2005
ISBN0-7803-8397-4
Pages233234; # of pages: 2
AbstractThis work focuses on improving the crystalline property of the LaS thin films by improving the deposition conditions. Many factors can affect the quality of laser deposited films, including vacuum level, laser energy, laser repetition rate, substrate temperature, target to substrate distance, background gas pressure, and substrate bias.
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Institute for Nutrisciences and Health
Peer reviewedNo
IdentifierIEEE Cat 05TH8837
NPARC number12346237
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Record identifierb7010cfa-73bf-4a37-a762-b360c2b3398a
Record created2009-09-17
Record modified2016-05-09
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