Field ion microscope evaluation of tungsten nanotip shape using He and Ne imaging gases

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DOIResolve DOI: http://doi.org/10.1016/j.ultramic.2012.07.026
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TypeArticle
Journal titleUltramicroscopy
ISSN03043991
Volume122
Pages6064; # of pages: 5
SubjectNanotip; Field ion microscopy; Gas field ion source
AbstractField ion microscopy (FIM) using neon imaging gas was used to evaluate a W(111) nanotip shape during a nitrogen assisted etching and evaporation process. Using appropriate etching parameters a narrow ring of atoms centered about the tip axis appears in a helium generated image. Etching of tungsten atoms continues exclusively on the outside of this well-defined ring. By replacing helium imaging gas with neon, normally inaccessible crystal structure of a tip apex is revealed. Comparison of the original W(111) tip (before etching) and partly etched tip shows no atomic changes at the tip apex revealing extraordinarily spatially selective etching properties of the etching process. This observation is an important step towards a detailed understanding of the nitrogen assisted etching and evaporation process and will lead to better control over atomically defined tip shapes.
Publication date
LanguageEnglish
AffiliationSecurity and Disruptive Technologies; National Research Council Canada
Peer reviewedYes
IdentifierS0304399112001969
NPARC number21268748
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Record identifierb733ab84-2e5a-40a1-a62e-a989b45cec8f
Record created2013-11-12
Record modified2016-05-09
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