Integrated high temperature longitudinal, shear and plate acoustic wave transducers

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DOIResolve DOI: http://doi.org/10.1143/JJAP.46.4688
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TypeArticle
Journal titleJapanese Journal of Applied Physics
Volume46
Issue7B
Pages46884692; # of pages: 5
SubjectHigh temperature ultrasonic measurement; Rayleigh wave transducer; Lamb wave transducer; longitudinal wave transducer; shear wave transducer; interdigital transducer; integrated ultrasonic transducer; nondestructive testing
AbstractThick (>40µm) ceramic films as piezoelectric ultrasonic transducers (UTs) have been successfully deposited on metallic substrates by a spray technique. In the film fabrication a composite consisting of piezoelectric powders well mixed with solution of high dielectric constant is directly sprayed onto the substrate. It is then dried, fired or annealed by heat. Multiple coating is used to achieve desired film thicknesses. A corona poling is utilized to achieve the piezoelectricity of the film. The top electrode is accomplished by painting, spray coating, or vacuum evaporation of appropriate electrode materials. All fabrication processes can be carried out on-site and by handheld devices. Integrated ultrasonic longitudinal, shear, and plate wave transducers have been made. These transducers have been tested and operated at 350°C.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Industrial Materials Institute
Peer reviewedYes
NRC number48957
NPARC number15775000
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Record identifierbb9ca51b-6cba-4a24-be81-777617976a64
Record created2010-07-06
Record modified2016-05-09
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