Metal/dielectric transmission interference filters with low reflectance. II. Experimental Results

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DOIResolve DOI: http://doi.org/10.1364/AO.34.005684
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TypeArticle
Journal titleApplied Optics
Volume34
Issue25
Pages56845694; # of pages: 11
AbstractThe successful fabrication of metal/dielectric multilayer filters requires not only accurate control of the individual layer thicknesses, but also a good knowledge of the optical constants of the materials used in the filters. In the case of metal films, it is also essential to know whether any transition layers are formed at the interfaces and, if so, how their thicknesses and optical constants depend on the deposition conditions. An automatic, real-time process control, magnetron sputtering deposition system was modified to permit the manufacture of metal/dielectric filters using optical monitoring techniques. To illustrate the performance of this system, two bandpass filters, a short-wavelength pass filter, and a neutral density filter were produced, all having a low reflectance for light incident on one side. The metal layers used in these filters consisted of either Ni or Ag. TheAg films could be protected from the O2 plasma using thin Ni or Si films. Good agreement was obtained between the calculated and measured spectral transmittance and reflectance curves.
Publication date
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12327393
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Record identifierbcc49eed-2d04-4746-b426-fbabd158e05a
Record created2009-09-10
Record modified2016-05-09
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