Low RF loss and noise of transmission lines on Si substrates using an improved ion implantation process

Alternative titleMicrowave Symposium Digest
AuthorSearch for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for:
TypeArticle
Conference2003 IEEE MTT-S International, 2003
Volume2
Pages813; # of pages: 6
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346409
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Record identifierbea86762-4b69-4d7b-bc9a-c5682dc6b1b3
Record created2009-09-17
Record modified2016-05-09
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