The use of etching during the precise manufacture of optical multilayer coatings

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TypeArticle
Journal titleVacuum Technology & Coating
Volume4
Issue3
Pages3641; # of pages: 6
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744197
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Record identifierbf262d8e-0c1c-4cf9-8eb8-a3e361256d08
Record created2009-10-27
Record modified2016-05-09
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