Temperature dependance of the mechanical properties of an RF MEMS switch

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TypeArticle
ConferenceConference Antem 2002, August 2002, St -Hubert, Quebec, Canada
Volume
Pages583
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346782
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Record identifierc4087f81-2b3f-4b3d-9f76-22eac00a189b
Record created2009-09-17
Record modified2016-05-09
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