Minimum profile ultrahigh vacuum gate valve based on linear/rotary motion feedthrough

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DOIResolve DOI: http://doi.org/10.1116/1.580000
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TypeArticle
Journal titleJ. Vac. Sci. Technol. A
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
Volume14
Issue4
Pages26692670; # of pages: 2
SubjectDESIGN; MOLECULAR BEAMS; POSITIONING; REMOTE CONTROL; ULTRAHIGH VACUUM; VACUUM SYSTEMS; VALVES
AbstractA simple, very low profile (< 1 in.) ultrahigh vacuum gate valve for isolation of molecular beam sources is described. The radial gate drive is based upon a linear/rotary motion feedthrough. A novel coupling scheme is described where the linear motion is used to translate the gate while the rotary motion is used to independently raise and lower the gate. A molecular beam skimmer, mounted on the gate, may be accurately and reproducibly located.
Publication date
AffiliationNational Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
NPARC number12334516
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Record identifierc485eed5-2a4e-4f4e-8b61-8d883d9760b7
Record created2009-09-10
Record modified2016-05-09
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