Design of a large measurement-volume metrological atomic force microscope (AFM)

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DOIResolve DOI: http://doi.org/10.1088/0957-0233/20/8/084003
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TypeArticle
Journal titleMeasurement Science and Technology
Volume20
Issue8
Pages084003-1084003-5; # of pages: 5
Subjectatomic force microscopy; nanotechnology; metrology
AbstractThe design of a large measurement-volume metrological atomic force microscope (AFM) is presented. The translation of the sample is accomplished with multiple stages which allow for separate 'coarse' and 'fine' motion. Interferometers and autocollimators are used to measure the position and orientation of the sample. The instrument does not attempt to control position via feedback from the interferometers, thereby allowing use of readily available commercial translation stages and controllers.
Publication date
PublisherIOP Science
LanguageEnglish
AffiliationNRC Institute for National Measurement Standards; National Research Council Canada
Peer reviewedNo
NPARC number21268136
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Record identifierc9369cda-e48e-4e10-88e4-6f594506d6ed
Record created2013-05-08
Record modified2016-05-09
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