Laser microfabrication of photonic crystal structures on silicon wafers

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Proceedings titleMicromachining Technology for Micro-Optics and Nano-Optics II
Series titleProceedings of SPIE; no. 5347
ConferencePhotonics West 2004, January 24-29, San Jose California
Subjectlaser microfabrication; photonic crystals
AbstractA new, versatile approach, applicable to virtually all substrate compositions on laser precision microfabrication of silicon wafers to achieve long-range ordering of colloidal crystals is proposed and demonstrated. In the absence of any surface pattern, the colloid spheres assemble in a randomly packed fashion. However, the presence of a surface pattern induces an ordered packing of the spheres on the lands with hexagonal packing. The colloidal crystal order can be controlled by choosing suitable spatial period of the laser micro-machined template.
Publication date
AffiliationNRC Industrial Materials Institute; National Research Council Canada
Peer reviewedYes
NPARC number21272493
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Record identifierc9b7b6f9-018f-48b3-b107-6a59ea284010
Record created2014-11-28
Record modified2017-09-13
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