Black layer coatings for the photolithographic manufacture of diffraction gratings

AuthorSearch for: ; Search for: ; Search for: ; Search for:
Proceedings titleOptical Interference Coatings: postconference digest
Series titleOSA trends in optics and photonics; Volume 63
ConferenceEighth Optical Society of America Topical Meeting on Optical Interference Coatings, Banff, Alberta, Canada, 15-20 July 2001
AbstractA black layer coating for an Al/photoresist interface is described with a reflectance less than 0.1% for 413 nm s-polarized light incident at 25º. It is made of space-compatible materials and its RMS roughness is less than 15Å.
Publication date
PublisherOptical Society of America
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12346334
Export citationExport as RIS
Report a correctionReport a correction
Record identifiercaf23a6e-abfd-4c75-b725-aac4a726bdcc
Record created2009-09-17
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)