Data Engineering for the Analysis of Semiconductor Manufacturing Data

Download
  1. (PDF, 166 KB)
AuthorSearch for:
TypeArticle
ConferenceInternational Joint Conference on Artificial Intelligence (IJCAI-95) Workshop on Data Engineering for Inductive Learning, August 20-25, 1995., Montréal, Québec, Canada
AbstractWe have analyzed manufacturing data from several different semiconductor manufacturing plants, using decision tree induction software called Q-YIELD. The software generates rules for predicting when a given product should be rejected. The rules are intended to help the process engineers improve the yield of the product, by helping them to discover the causes of rejection. Experience with Q-YIELD has taught us the importance of data engineering-pre-processing the data to enable or facilitate decision tree induction. This paper discusses some of the data engineering problems we have encountered with semiconductor manufacturing data. The paper deals with two broad classes of problems: engineering the features in a feature vector representation and engineering the definition of the target concept (the classes).Manufacturing process data present special problems for feature engineering, since the data have multiple levels of granularity (detail, resolution). Engineering the target concept is important, due to our focus on understanding the past, as opposed to the more common focus in machine learning on predicting the future.
Publication date
LanguageEnglish
AffiliationNRC Institute for Information Technology; National Research Council Canada
Peer reviewedNo
NRC number39163
NPARC number5763791
Export citationExport as RIS
Report a correctionReport a correction
Record identifierce224b28-d08b-4c5f-a50a-a8451413fbf6
Record created2009-03-29
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)