Fabrication of out-of-plane micro-mirrors in silicon-on-insulator planar waveguides

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DOIResolve DOI: http://doi.org/10.1116/1.2186656
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TypeArticle
Journal titleJournal of Vacuum Science & Technology A
Volume24
Issue3
Pages718722; # of pages: 5
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedNo
NPARC number12744830
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Record identifiercf6917d1-4ce7-4d7f-8a6e-4ee58aca2f96
Record created2009-10-27
Record modified2016-05-09
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