Electrostatic actuator with liquid metal-elastomer compliant electrodes used for on-chip microvalving

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DOIResolve DOI: http://doi.org/10.1088/0960-1317/22/9/097001
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TypeArticle
Journal titleJournal of Micromechanics and Microengineering
ISSN0960-1317
Volume22
Issue9
Article number97001
SubjectCompliant electrodes; Elastomeric membranes; Flexible electrodes; Gas channels; Micro valves; On chips; Liquid metals; Valves (mechanical); Electrostatic actuators
AbstractWe describe a new class of electrostatic actuators with a compliant electrode made of liquid metal alloy contained by a thin elastomeric membrane. We illustrate the use of such actuators as on-chip microvalves for gas flow control. The microvalve comprises of one fixed electrode spanning the floor and sidewalls of the trapezoidal gas channel and one corresponding flexible electrode suspended across the channel. Details of fabrication and preliminary characterization of on/off and proportional valving are presented.
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LanguageEnglish
Peer reviewedYes
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This is a non-NRC publication

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NPARC number21270228
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Record identifiercfa7b48d-2b0a-4b25-9f44-45ecd31597f6
Record created2014-01-14
Record modified2016-05-09
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