Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications

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TypeArticle
Journal titleNanotechnology
Volume19
Issue12
PagesArt #125705
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number471
NPARC number8926526
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Record identifierd232f6ad-fd96-4b2f-a577-45572f37e740
Record created2009-04-23
Record modified2016-05-09
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