Structure characterization of AlN buffer layers grown on (0001) sapphire by magnetron sputter epitaxy

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DOIResolve DOI: http://doi.org/10.1016/S0022-0248(02)01602-0
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TypeArticle
Journal titleJournal of Crystal Growth
Volume244
Issue1
Pages15; # of pages: 5
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Steacie Institute for Molecular Sciences
Peer reviewedNo
NPARC number12338420
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Record identifierd4fe075b-e547-4b56-bb5f-0823b8451829
Record created2009-09-10
Record modified2016-05-09
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