Evaluation of the electrical properties of nickel silicide films for ULSI applications

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TypeArticle
Proceedings title1996 proceedings : Thirteenth International VLSI Multilevel Interconnection Conference (VMIC)
ConferenceThirteenth International VLSI Multilevel Interconnection Conference, 22-23 February 1996, Santa Clara, CA, USA
Pages560565; # of pages: 6
Publication date
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12327202
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Record identifierd536e210-7ee2-4a6b-9383-eda126f10932
Record created2009-09-10
Record modified2016-05-09
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