Thermal stability of platinum silicide insub-micron lines

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Proceedings titleMaterials reliability issues in microelectronics V
Series titleMaterials Research Society symposia proceedings; Volume 391
Conference1995 MRS Fall Meeting, Symposium on Materials reliability issues in microelectronics V, San Francisco, California, USA, April 17-21, 1995
Pages223228; # of pages: 6
Publication date
PublisherMaterials Research Society
AffiliationNational Research Council Canada; NRC Institute for Microstructural Sciences
Peer reviewedNo
NPARC number12338466
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Record identifierd55688eb-7fbc-4fbe-9d5d-b5dea48d63e4
Record created2009-09-10
Record modified2016-05-09
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