Si/Si1-x Ge x photodetectors using three-dimensional growth modes to enhance photoresponse at λ=1550 nm

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DOIResolve DOI: http://doi.org/10.1116/1.582231
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TypeArticle
Journal titleJournal of Vacuum Science & Technology A
Volume18
Issue2
Pages588592; # of pages: 5
Publication date
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada; NRC Institute for National Measurement Standards
Peer reviewedNo
NPARC number8898397
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Record identifierd6d2663f-1e3c-4935-866c-8144268783f0
Record created2009-04-22
Record modified2016-05-09
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