Black layer coatings for the photolithographic manufacture of diffraction gratings

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DOIResolve DOI: http://doi.org/10.1364/AO.41.003306
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TypeArticle
Journal titleApplied Optics
Volume41
Issue16
Pages33063311; # of pages: 6
AbstractA black layer coating for an aluminum–photoresist interface with a reflectance less than 0.1% for 413-nm, s-polarized light incident at 25° is described. It is made of space-compatible materials, and its rms roughness is less than 15 Å.
Publication date
PublisherOptical Society of America
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedYes
NPARC number21268065
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Record identifierd8ffe21c-eeb2-4e16-b31f-c0d93468aeae
Record created2013-04-05
Record modified2016-05-09
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