Experimental study of drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses

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DOIResolve DOI: http://doi.org/10.1016/S0169-4332(99)00331-1
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TypeArticle
Journal titleApplied Surface Science
ISSN0169-4332
Volume152
Issue3
Pages138148; # of pages: 11
SubjectDrilling; Laser ablation; Mathematical models; Micromachining; Pulsed laser applications; Solid state lasers; Ultrafast phenomena; Laser parameters; Metal foil
AbstractAluminum foils with thickness ranging from 1.5 to 50 μm, and W, Mo, Ti, Cu, Fe, Ag, Au, and Pb foils of 25 μm thickness have been drilled with femtosecond Ti:sapphire laser pulses centered at 800 nm. The influence of laser parameters and material properties on hole drilling processes at sub-10 μm scale has been examined. A simple model is shown to predict the ablation rate for a range of metals.
Publication date
PublisherElsevier
LanguageEnglish
AffiliationNational Research Council Canada; NRC Institute for National Measurement Standards; Security and Disruptive Technologies; Automotive and Surface Transportation
Peer reviewedYes
NPARC number21276188
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Record identifierd909edcd-4fbc-406d-99a6-fdb0a347e3d1
Record created2015-09-28
Record modified2016-05-09
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