Pattern Replication of 100 nm to Millimeter-Scale Features by Thermal Nanoimprint Lithography

Download
  1. (PDF, 395 KB)
AuthorSearch for: ; Search for:
TypeArticle
Proceedings titleProceedings. The 1st International Conference on Micro- and Nano-Technology (Viennano ’05)
ConferenceThe 1st International Conference on Micro- and Nano-Technology (Viennano ’05), Vienna, Austria, March 09-11, 2005
Publication date
LanguageEnglish
AffiliationNational Research Council Canada (NRC-CNRC); NRC Industrial Materials Institute
Peer reviewedNo
NRC number48971
NPARC number15966890
Export citationExport as RIS
Report a correctionReport a correction
Record identifierda483fb4-363a-4d29-8162-aa5d77d4260d
Record created2010-11-02
Record modified2016-05-09
Bookmark and share
  • Share this page with Facebook (Opens in a new window)
  • Share this page with Twitter (Opens in a new window)
  • Share this page with Google+ (Opens in a new window)
  • Share this page with Delicious (Opens in a new window)