Beam focusing characteristics of silicon microtips with an in-plane lens

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DOIResolve DOI: http://doi.org/10.1109/16.556161
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TypeArticle
Journal titleIEEE Transactions on Electron Devices
ISSN0018-9383
Volume44
Issue3
Pages498502; # of pages: 5
AbstractSingle microtips, 2×2 and 10×10 arrays of microtips surrounded by an integrated focusing ring, were fabricated and their focusing characteristics experimentally investigated. Observation of the beam on a phosphor screen shows that the focusing is very effective for single microtips and 2×2 arrays; moreover, the reduction in emitted current is much smaller than for double-gate focusing. 10×10 arrays of microtips, however, do not generate very focused beams. These results agree well with simulations. The possibility of simultaneous focusing and deflecting is also discussed, and a new structure combining the advantages of double-gate and surrounding ring focusing is suggested.
Publication date
PublisherIEEE
LanguageEnglish
AffiliationNRC Institute for Microstructural Sciences; National Research Council Canada
Peer reviewedYes
NPARC number21264934
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Record identifierdaa68061-f651-4262-ac69-4f1124dcaba8
Record created2013-03-21
Record modified2016-05-09
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