Low-stress silicon carbonitride for the machining of high-frequency nanomechanical resonators

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TypeArticle
Journal titleJournal of Vacuum Science & Technology B
Volume25
Issue1
Pages337; # of pages: 27
Publication date
AffiliationNRC National Institute for Nanotechnology; National Research Council Canada
Peer reviewedYes
NRC number327
NPARC number8926073
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Record identifierde4b241d-1c47-4b74-bb11-b7a8afbe0b0e
Record created2009-04-23
Record modified2016-05-09
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